| 发明名称 |
MAGNETIC DISK DEVICE, MAGNETIC DISK AND ITS MANUFACTURING METHOD |
| 摘要 |
PROBLEM TO BE SOLVED: To manufacture a magnetic disk at high yield, the magnetic layer of which is protected by a stably formed DLC film. SOLUTION: The DLC film is formed in a plasma process while adding oxygen to a plasma gas. |
| 申请公布号 |
JP2001155325(A) |
申请公布日期 |
2001.06.08 |
| 申请号 |
JP19990336458 |
申请日期 |
1999.11.26 |
| 申请人 |
FUJITSU LTD |
发明人 |
ITANI TSUKASA;NAKAMURA TETSUKAZU;SUDA SHOICHI;TAKEDA MASAYUKI;KURIHARA KAZUAKI |
| 分类号 |
G11B5/72;C01B31/02;C23C14/34;G11B5/84 |
主分类号 |
G11B5/72 |
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