METHOD FOR SHAPING LASER BEAM, SHAPING DEVICE AND APPARATUS FOR CRYSTALIZING THIN FILM BY LASER BEAM

摘要

PROBLEM TO BE SOLVED: To easily and surely shape the beam shape of a laser. SOLUTION: In a homogenizer 60, the length of the optical path of respective cylindrical lenses in adjacent lens groups 14 and 15 is made different partially or entirely. Therefore, the beam shape of the laser passing through the homogenizer 60 can be shaped easily and surely, and it is applicable to the manufacturing of a crystalized thin film of good quality.