| 发明名称 |
GAS BEARING |
| 摘要 |
PROBLEM TO BE SOLVED: To suppress pressure rise in a vacuum chamber caused by a movement of an air bearing, in regard to a gas bearing. SOLUTION: A coating layer 2 is provided on the surface of a guide shaft 1 guiding a gas bearing 3 having a differential exhausting portion used in a vacuum. |
| 申请公布号 |
JP2001153140(A) |
申请公布日期 |
2001.06.08 |
| 申请号 |
JP19990335514 |
申请日期 |
1999.11.26 |
| 申请人 |
FUJITSU LTD;ADVANTEST CORP |
发明人 |
ASAI MASAFUMI;HONJO ICHIRO;ISHIDA KAZUJI;TSUDA AKIYOSHI |
| 分类号 |
H01L21/027;F16C32/06;G03F7/22;(IPC1-7):F16C32/06 |
主分类号 |
H01L21/027 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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