| 摘要 |
PROBLEM TO BE SOLVED: To provide an illumination optical unit which can illuminate a desired region selectively with high accuracy while correcting uneven illumination or telecentricity shift easily. SOLUTION: The illumination optical unit for illuminating a plane 9 to be illuminated comprises a light source 1 for supplying a light beam, a rod type optical integrator 4 forming a plurality of light source images by reflecting the light beam from the light source on the inner surface, and relay optical systems 5a, 5b, 8a, 8b for directing the light passed through the rod type optical integrator toward the plane to be illuminated wherein the relay optical systems form at least one aerial image I1 conjugate with the plane to be illuminated between the outgoing plane of the rod type optical integrator and the plane to be illuminated.
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