发明名称 |
METHOD AND INSTALLATION FOR SELECTIVE SURFACE TREATMENT |
摘要 |
The invention concerns a method for selective surface treatment, which consists in the following steps in combination: covering the surface to be treated with a mask made of a material capable of resisting to a surface treatment using excited or unstable gaseous species (which can be a plastic, stainless steel, ceramic plate, i.e. a material different from conventional masks made of resin), mask wherein the units corresponding to the desired selectivity have been opened; treating the surface thus covered with its mask, with a treating gas atmosphere comprising excited or unstable gaseous species. The invention is useful for making electronic circuits. |
申请公布号 |
WO0140533(A1) |
申请公布日期 |
2001.06.07 |
申请号 |
WO2000FR03309 |
申请日期 |
2000.11.27 |
申请人 |
L'AIR LIQUIDE, SOCIETE ANONYME POUR L'ETUDE ET L'EXPLOITATION DES PROCEDES GEORGES CLAUDE;SINDZINGRE, THIERRY;CARSAC, CLAUDE;UNER, JASON, R. |
发明人 |
SINDZINGRE, THIERRY;CARSAC, CLAUDE;UNER, JASON, R. |
分类号 |
B08B7/00;C23C8/04;C23G5/00;H05K3/22;H05K3/34 |
主分类号 |
B08B7/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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