发明名称 METHOD AND INSTALLATION FOR SELECTIVE SURFACE TREATMENT
摘要 The invention concerns a method for selective surface treatment, which consists in the following steps in combination: covering the surface to be treated with a mask made of a material capable of resisting to a surface treatment using excited or unstable gaseous species (which can be a plastic, stainless steel, ceramic plate, i.e. a material different from conventional masks made of resin), mask wherein the units corresponding to the desired selectivity have been opened; treating the surface thus covered with its mask, with a treating gas atmosphere comprising excited or unstable gaseous species. The invention is useful for making electronic circuits.
申请公布号 WO0140533(A1) 申请公布日期 2001.06.07
申请号 WO2000FR03309 申请日期 2000.11.27
申请人 L'AIR LIQUIDE, SOCIETE ANONYME POUR L'ETUDE ET L'EXPLOITATION DES PROCEDES GEORGES CLAUDE;SINDZINGRE, THIERRY;CARSAC, CLAUDE;UNER, JASON, R. 发明人 SINDZINGRE, THIERRY;CARSAC, CLAUDE;UNER, JASON, R.
分类号 B08B7/00;C23C8/04;C23G5/00;H05K3/22;H05K3/34 主分类号 B08B7/00
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