ELECTROSTATIC ATTRACTION-TYPE INK SPRAY APPARATUS AND PREPARATION METHOD THEREOF

摘要

PURPOSE: An electrostatic attraction-type ink spray apparatus for a printer head and its preparation method are provided, to simplify the making process by manufacturing a membrane together with a driving part. CONSTITUTION: The ink spray apparatus comprises a substrate(115) which comprises an ink chamber(127) for receiving an ink supplied from the external ink source and a nozzle hole connected with the ink chamber; a membrane(130) which is formed on the substrate; a lower board(117) which is placed inside of the ink chamber; and an upper board(137) which is placed outside of the ink chamber. The membrane(130) is curved into the inside when the electrostatic attractive force is generated due to the potential difference between the lower board and the upper board, thereby to press the ink of the ink chamber(127) and allow the ink to be sprayed through the nozzle hole. The method comprises the steps of etching a wafer to from the ink chamber and the nozzle hole; forming the lower board inside of the ink chamber by evaporation; adhering a polyamide sheet to the wafer; etching the polyamide sheet to form the membrane; and forming the upper board on the membrane by evaporation.