发明名称 Semiconductor inductor
摘要 An inductor. A silicon substrate of a first conductive type is provided. A spiral conductive layer is formed over the silicon substrate. A doped region of a second conductive type is formed in the substrate below the spiral conductive layer. A doped region of the first conductive type is next formed in the substrate around the doped region of the second conductive type. A reverse-bias voltage is applied to the doped region of the first conductive type and the doped region of the second conductive type. The application of a reverse-bias voltage creates a depletion region beneath the doped region of the second conductive type and the space between the doped regions.
申请公布号 US6242791(B1) 申请公布日期 2001.06.05
申请号 US19990375688 申请日期 1999.08.17
申请人 UNITED MICROELECTRONICS CORP. 发明人 JOU CHEWNPU
分类号 H01L21/02;H01L23/522;H01L23/64;H01L27/08;(IPC1-7):H01L29/00 主分类号 H01L21/02
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