| 摘要 |
PURPOSE: An insulator structure of a capacitance vacuum sensor is provided to easily process and to reduce a manufacturing cost by using glass of high purity, and to stabilize electrostatic capacity value by having a spherical electrode surface at an end of an insulator. CONSTITUTION: An insulator structure of the capacitance vacuum sensor includes two vacuum ports formed integrally with a sensor housing(2) between an insulator(3) and the sensor housing, the insulator assembled by a method that glass of high purity is joined with steel and directly joined to the sensor housing, an electrode(1) capable of joining in a high vacuum condition, an electrode plate having an electrode surface made by cutting two condenser plates on a processed round surface with a vacuum evaporating method and allowing the use of various materials with the vacuum evaporating method, a diaphragm(4) connected to a vacuum sensor body(7) and disposed between the electrode plate vacuum-evaporated on the end surface of the insulator and a buffle(10) for changing electrostatic capacity, and a vacuum sensor body connecting the insulator, the vacuum ports and the electrode.
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