发明名称 |
VACUUM EXHAUST SYSTEM |
摘要 |
A vacuum exhaust system can improve the operating efficiency of the vacuum exhaust system while reducing the system cost, to quickly attain a vacuum in the auxiliary chambers without increasing the size of the vacuum pumps. The vacuum exhaust system comprises a first pumping section and a second pumping section disposed downstream of and in series with the first pumping section. A main exhaust passage is provided to communicate a main chamber with a suction port of the first pumping section, and an auxiliary exhaust passage is provided to communicate an auxiliary chamber with a suction port of the second pumping section.
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申请公布号 |
US2001001950(A1) |
申请公布日期 |
2001.05.31 |
申请号 |
US19990252236 |
申请日期 |
1999.02.18 |
申请人 |
KAWAMURA TAKESHI;NIIMURA YASUHIRO |
发明人 |
KAWAMURA TAKESHI;NIIMURA YASUHIRO |
分类号 |
F04B37/16;C23C16/44;C23C16/54;H01L21/02;H01L21/205;(IPC1-7):C23C16/00 |
主分类号 |
F04B37/16 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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