发明名称 |
METHOD AND APPARATUS FOR PERSONALIZATION OF SEMICONDUCTOR |
摘要 |
<p>A system for making small modifications to the pattern in standard processed semiconductor devices. The modifications are made to create a small variable part of the pattern against a large constant part of the same pattern. In a preferred embodiment the exposure of the variable and constant parts are done with the same wavelength in the same combined stepper and code-writer. The invention devices a way of writing variable parts of the chip that is automatic, inexpensive and risk-free. A system for automatic design and production of die-unique patterns is also shown.</p> |
申请公布号 |
WO0139269(A1) |
申请公布日期 |
2001.05.31 |
申请号 |
WO2000SE02325 |
申请日期 |
2000.11.24 |
申请人 |
MICRONIC LASER SYSTEMS AB;SANDSTROEM, TORBJOERN |
发明人 |
SANDSTROEM, TORBJOERN |
分类号 |
G03F1/08;G03F7/20;H01L21/027;H01L23/58;(IPC1-7):H01L23/544 |
主分类号 |
G03F1/08 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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