| 发明名称 |
Method and circuit for minimizing the charging effect during manufacture of semiconductor devices |
| 摘要 |
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| 申请公布号 |
EP1061580(A3) |
申请公布日期 |
2001.05.30 |
| 申请号 |
EP20000305161 |
申请日期 |
2000.06.19 |
| 申请人 |
SAIFUN SEMICONDUCTORS LTD. |
发明人 |
EITAN, BOAZ;BLOOM, ILAN |
| 分类号 |
H01L21/3205;H01L21/02;H01L21/3065;H01L21/311;H01L21/822;H01L21/8234;H01L21/8238;H01L21/8247;H01L23/52;H01L27/02;H01L27/04;H01L27/06;H01L27/088;H01L27/092;H01L27/10;H01L27/115;(IPC1-7):H01L27/02 |
主分类号 |
H01L21/3205 |
| 代理机构 |
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| 主权项 |
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