发明名称 Method for the integrated manufacture of tips mounted to a support
摘要 <p>Tip production on a base, by forming an inverted tip (4) in a first substrate (1), bonding the substrate to a second substra (7) and removing the first substrate material, is new. A tip is formed on a base by (a) forming an inwardly extending tip (4) in a first substrate (1); (b) covering the tip with adhesion layer (5) and then a bonding layer (6); (c) forming a profile (9) in a second substrate (7); (d) bonding the substrates such that the profile faces the tip and the layers; (e) removing the first substrate to expose the tip; and (f) cutting to secon substrate to the dimensions of the base.</p>
申请公布号 EP1050740(A3) 申请公布日期 2001.05.30
申请号 EP20000810053 申请日期 2000.01.21
申请人 CSEM 发明人 NIEDERMANN, PHILIPP
分类号 B81B1/00;B81C1/00;G01B7/34;(IPC1-7):G01B7/34;G12B21/02 主分类号 B81B1/00
代理机构 代理人
主权项
地址