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发明名称
METHOD FOR FORMING RECESSED GATE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
KR20060105287(A)
申请公布日期
2006.10.11
申请号
KR20050027948
申请日期
2005.04.04
申请人
HYNIX SEMICONDUCTOR INC.
发明人
PARK, SANG SOO;KIM, KEUN TAE
分类号
H01L21/336
主分类号
H01L21/336
代理机构
代理人
主权项
地址
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