发明名称 Temperature managing apparatus for multi-stage container
摘要 A temperature managing apparatus according to the invention comprises cooling jackets provided in each of a plurality of test containers, a tank for storing a cooling medium for the cooling jackets, first pumps, second pump, constant pressure valves for making constant the amount of the transferred cooling medium, and a heat exchanger. The tank has partitions that are horizontally and vertically movable. The partitions partition the interior of the tank into a first storage area, a second storage area, and a third area interposed therebetween.
申请公布号 US6239602(B1) 申请公布日期 2001.05.29
申请号 US19990324427 申请日期 1999.06.01
申请人 TOKYO ELECTRON LIMITED 发明人 NAKAGOMI YOICHI;FURUYA KUNIHIRO;TSUKADA HIROSHI
分类号 H01L21/673;F25D9/00;G01R31/26;G01R31/28;G05D23/19;(IPC1-7):G01R31/02;F28F7/00 主分类号 H01L21/673
代理机构 代理人
主权项
地址