| 摘要 |
PROBLEM TO BE SOLVED: To provide a simultaneous working cylinder device capable of simultaneously actuating a large number of cylinder devices. SOLUTION: In this simultaneous actuating cylinder device, plural compressed air supply and exhaust openings for simultaneously supplying and exhausting the compressed air are formed on a base, and each supply and exhaust opening is provided with a cylinder unit having a cylinder body, a piston body, a spring means for moving and energizing the piston body to a direction approaching the base, and a pressure chamber for projecting the piston body from the base against the spring means when the compressed air is supplied to the supply and exhaust opening. This cylinder device can be applied to, for example, a device for simultaneously examining a large number of ICs where each IC to be examined is pressed to the base.
|
