发明名称 METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE AND SEMICONDUCTOR MANUFACTURING DEVICE USED THEREFOR
摘要 PROBLEM TO BE SOLVED: To improve yield by reducing adhesion of foreign matters to an external terminal of a semiconductor device, and simplify visual inspection after molding. SOLUTION: This semiconductor device comprises a die bonding portion in which a semiconductor chip is mounted on a plurality of tape substrates, first and second wire bonding portions that connect a pad of the semiconductor chip and a substrate side electrode of the tape substrate which corresponds to this pad, a tape reverse portion that arranges the semiconductor chip at the lower side of the tape substrate by reversing a wire-bonded base substrate 2, and a mold portion in which a cavity 4e and a positioning pin 4f that positions the base plate after the front and rear are reversed are provided at a die surface 4d of a lower die 4c. In the mold portion, the misalignment of a sealing portion can be prevented by guiding the base plate 2 after the front and rear are reversed with the positioning pin 4f, arranging the semiconductor chip at the cavity 4e, and subsequently performing molding.
申请公布号 JP2001148390(A) 申请公布日期 2001.05.29
申请号 JP19990328801 申请日期 1999.11.18
申请人 HITACHI LTD 发明人 KURATOMI BUNJI;YAMADA NOBUAKI
分类号 H01L21/56;(IPC1-7):H01L21/56 主分类号 H01L21/56
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