MOLD FOR DEFORMED SEMISPHERICAL MICROSTRUCTURE, MICRO- CONCAVE MIRROR, AND METHOD FOR MANUFACTURING THE SAME

摘要

PROBLEM TO BE SOLVED: To provide a mold for a deformed semispherical microstructure such as an oval spherical element suitable as a mirror for coupling lights in horizontal and vertical directions, a micro-concave mirror, and a method for manufacturing the same. SOLUTION: A method for manufacturing a mold for a deformed semispherical microstructure includes a process for preparing a substrate 1 having a conductive part 13 provided in at least a part thereof, a process for forming an insulating mask layer 15 on the substrate, a process for forming aperture parts 17 to the mask layer 15 and a process for forming plating layers 19 on the aperture parts 17 and the mask layer 15 through the aperture parts 17 by electroplating using the conductive part 13 as a cathode. A plating liquid is allowed to flow on the aperture parts 17 relatively with respect to the substrate to form the deformed semispherical plating layers 19.