| 摘要 |
PROBLEM TO BE SOLVED: To provide a measuring method for the shape of an object, in which a high-accuracy measuring probe with a small dynamic range can be used even when a spherical shape or an aspherical shape is measured, and is which the shape of the object can be measured in a short time. SOLUTION: Reference points (origins) of respective measuring probes 21 to 26 are situated on a curve whose distance from a measuring reference face is expresses by s(x)+e(x)}. The shape of s(x) is decided so as to agree nearly with the surface shape of an object 3 to be measured as an ideal object when the central point of a baseplate 1 agrees with the central point of the object 3 top be measured. Consequently, the dynamic range and the measuring distance of the measuring probes can be reduced, and the measuring accuracy of the measuring probes can be increased. By using such a measuring apparatus, a measurement which conforms to a two-pint method of the like in conventional cases is performed. Since data which corresponds to the number of measuring probes can be obtained in one scanning operation, the measuring time of the measuring apparatus can be shortened.
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