| 摘要 |
PURPOSE: An inner shield assembly for magnetic field shield is provided to prevent deterioration of purity characteristic by flowing magnetic flux leaked from attached part to an orthogonal side along with reinforce plate. CONSTITUTION: A magnetic flux is installed at corner part installing reinforce plate between mutually orthogonal side at the opening of incident side of inner shield to define incident path of electron beam. An inner shield is composed of shield part(2) of predetermined shape formed and divided into more two in order to shield front of exit of electron beam. A shield part(2) has flange(6) in a unite to be connected with frame body(4)
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