| 摘要 |
PURPOSE: A method of fabricating a liquid crystal panel is to crystallize a silicon thin film so that all channels of devices have a uniform grain boundary among the devices, thereby equally forming an electric property among the devices constructing a drive circuit portion and a pixel portion. CONSTITUTION: A silicon grain is grown to be inclined at a desired angle from a horizontal direction of a polycrystalline silicon thin film(70). A drive circuit portion and a pixel portion constructed by devices are formed using a crystallized silicon thin film. In the devices, channels are aligned in the horizontal or vertical direction of the silicon thin film. The silicon thin film is crystallized using a laser beam. The laser beam is slantingly scanned at a desired angle from the horizontal direction of the silicon thin film. The slant laser beam is generated by a mask in which a slant line type light transmitting area is formed. The mask having the slant type light transmitting area is aligned at a desired angle with respect to the silicon substrate.
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