| 摘要 |
An electrical resistance type humidity sensor is herein disclosed which comprises a humidity sensor in which electrodes are formed on a woodceramics substrate having linear characteristics with humidity, and a temperature sensor for temperature correction in which electrodes are formed on other woodceramics substrate having the identical characteristics as in the woodceramics humidity sensor and a film coating of a nonhygroscopic material is formed on the surface of the substrate. Thus, a resistance value measured by the woodceramics humidity sensor is corrected on the basis of a resistance value measured by the woodceramics temperature sensor to obtain an output voltage in proportion to a relative humidity. A structure insensitive to a humidity formed from all the same material i.e. woodceramics as in the humidity sensor is utilized as the temperature sensor for the temperature correction to carry out the temperature correction by the temperature sensor, whereby the humidity sensor having the linear characteristics can be obtained.
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