| 摘要 |
A method and a device for contactless inspection of objects on a substrate, by means of an inspection device during relative motion between the substrate and the inspection device, wherein the following steps are performed by the method;generating a first image comprising object height information by illuminating at least a portion of the substrate comprising one or more objects by means of first radiator and imaging at least one of said one or more objects illuminated by said first radiator onto a two-dimensional matrix sensor having a portionwise addressable matrix of pixel elements;generating a second image comprising object area information by illuminating at least a portion of the substrate comprising one Or more objects by means of second radiator and imaging at least one of said one or more objects illuminated by said second radiator onto said sensor;extracting the object height information, by means of said sensor, from said first image; andextracting the object area information, by means of said sensor, from said second image. |
