METHOD AND APPARATUS FOR MOLECULAR ANALYSIS OF BURIED LAYERS

摘要

A method and apparatus are provided for the analysis of buried layers of an analyte material by: a) removing surface layers of said analyte material with an atomic force microscopy (AFM) stylus to expose a buried layer; and b) analyzing a buried layer, preferably for molecular structure. An apparatus is provided which encompasses both AFM and one or more additional surface analytical apparati within a controlled atmosphere under coordinated computer control.