发明名称 |
Vacuum bearing structure and a method of supporting a movable member |
摘要 |
A vacuum bearing structure comprises a combination of a planar gas bearing with a differentially-pumped vacuum seal. The bearing surface and the vacuum seal surfaces are formed of a porous material divided into a first outer region through which bearing gas can percolate to provide support and an inner second region providing the vacuum seal. An exhaust groove separates the two regions so that bearing gas can flow to atmosphere. The resulting structure can operate at a lower fly height to reduce loading on the differentially-pumped vacuum seal. The structure is particularly useful for motion feedthroughs into vacuum processes such as ion implantation. |
申请公布号 |
GB0106181(D0) |
申请公布日期 |
2001.05.02 |
申请号 |
GB20010006181 |
申请日期 |
2001.03.13 |
申请人 |
APPLIED MATERIALS INC |
发明人 |
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分类号 |
F04B37/16;C23C14/48;C23C14/50;F16C29/02;F16C32/00;F16C32/06;H01J37/18;H01J37/317 |
主分类号 |
F04B37/16 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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