| 摘要 |
PROBLEM TO BE SOLVED: To provide an X-ray source allowing for better controllability of the waveforms of pulsed X-rays. SOLUTION: The X-ray source 1 includes a cathode 3 and an anode 4 disposed in a spaced relationship inside a vacuum container and to which high voltages are applied, and a positive ion generating means 70 for generating positive ions 7 inside an electric field 5 formed between the cathode 3 and the anode 4. The anode 3 is bombarded with secondary electrons 8 produced by bombardment of the cathode 4 with the positive ions 7, to generate an X-ray 9 from the anode 3. Generation of the positive ions 7 is controlled to control the waveform of the X-ray.
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