| 摘要 |
PROBLEM TO BE SOLVED: To provide a new optical inspection method and a device capable of making an optical inspection by plural light sources by a single stage or a closely adjacent stage and capable of reducing a space, time and a cost for an inspection. SOLUTION: An inspection object article W is irradiated by plural light sources 11, 12, 13 for emitting the light L1, L2, L3 of mutually different wave length areas, and spectral members 21, 22, 23 for reflecting the light of a specific wave length area among the light of the plural wave length areas and passing the light of the other wave length area are interposed on the optical axis of cameras 31, 32, 33 for receiving the light from the inspection object article W to photograph and inspect an image by the respective cameras 31, 32, 33 arranged in response to the light of the respective wave length areas spectrally diffracted by the spectral members.
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