| 摘要 |
PROBLEM TO BE SOLVED: To enhance rigidity of XY slow motion mechanisms, to improve a scanning speed, and to miniaturize a device without narrowing a scanning area in a scanning probe microscope. SOLUTION: XY slow motion mechanisms 6, 12 of a scanning probe microscope are arranged on both the sample side and the cantilever side, both XY slow motion mechanisms 6, 12 are independently operated, and a probe 1a and a sample 2 are releatively scanned.
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