CERAMIC HEATER

摘要

PROBLEM TO BE SOLVED: To obtain a ceramic heater to prevent heat flow from the ceramic heater to the supporting vessel or the like and to give a uniform temperature for the ceramic basal plate. SOLUTION: The ceramic heater 10 comprises a heating element on the surface or inside the ceramic basal plate. The surface roughness of the side face of the ceramic basal plate is Rmax=0.1 to 200μm of JIS B 0601.