| 摘要 |
PROBLEM TO BE SOLVED: To provide a new resistance thermometer bulb for very low temperature, which has little dependence of resistance upon temperature in a range of at most 4K, is superior in stability to thermal cycle and easy to form a thin film, and exhibits superior characteristic, when silicon oxide of low cost is used as a substrate. SOLUTION: This resistance bulb for a thermometer, which does not affected by a magnetic field under very low temperature is provided with a chromium nitride thin film of 50-1,000 nm in thickness on a substrate. The content of nitrogen in the chromium nitride thin film is 40-60 atm.%.
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