STANDARD SAMPLE FOR ELECTRIC FORCE MICROSCOPE

摘要

PROBLEM TO BE SOLVED: To simultaneously evaluate potential resolution and space resolution and reduce the time required for evaluation. SOLUTION: A standard sample 1 for an electric force microscope has known values of potential and shape and includes a substrate 2 made from a dielectric and a conductive electrode pattern 4 formed on the substrate 2, the electrode pattern 4 having a potential pattern whose potential distribution is known and a space pattern whose shape is known. The potential distribution and the space resolution of the electric force microscope are evaluated by comparing the known values of potential and shape with measurements made by the electric force microscope. Use of the standard sample with the known values of potential and shape enables simultaneous evaluation of the potential resolution and the space resolution, thereby reducing evaluation time, and enhancing the accuracy of evaluation.