PATTERN FORMATION METHOD, ELECTRONIC ELEMENT, OPTICAL ELEMENT, AND CIRCUIT SUBSTRATE

摘要

PROBLEM TO BE SOLVED: To provide a method for eliminating the need for high-temperature heating when forming a fine pattern with improved uniformity being made of the thin film of a metal oxide on the surface of a base. SOLUTION: The method for forming a layer with a desired pattern on the surface of a base includes a process (a) for covering a region where no oxide layer is formed with a covering material for a surface for forming a pattern on the base; a process (b) for forming a layer such as an oxide of an element on the entire surface of the pattern formation surface of the base by applying a solution such as the fluoro metal complex compound of at least one type of element, or an aqueous solution of hydrofluoric acid being selected from a group consisting of alkaline earth metal and transition metal under the presence of a fluoride ion-capturing agent; and a process (c) for eliminating the covering material and the layer formed on the surface.