摘要 |
PROBLEM TO BE SOLVED: To obtain a polyphenylene oligomer, which is a polymer derivative in ultrasmall electronic processing, and to provide a use thereof and products produced therefrom. SOLUTION: This composition comprises a specific solvent (preferably a mixture ofγ-butyrolactone and mesitylene) and a curable oligomer contained therein and prepared by reacting a biscyclopentadienone compound, a polyfunctional acetylene compound, and if necessary, a diacetylene compound. Integrated circuit products produced by using the composition and a method for producing the same are also provided. Since having a high thermal stability, a high glass transition temperature, a low permittivity, and a capability for filling gaps and for flattening a patterned surface, the composition is useful as an interlayer dielectric in integrated circuits.
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