发明名称 Photosensitive resin composition and making process
摘要 A photosensitive resin composition contains a photosensitive resin comprising recurring units of formula (1) and having a Mw of 1,300-11,000 and 20-5,000 ppm of a tertiary amine compound of formula (2).R is hydrogen or a 1,2-naphthoquinonediazido-5-sulfonic acid residue, the content of 1,2-naphthoquinonediazido-5-sulfonic acid residue in R is 3-27 mol %, and m is a number from 0 to 3, X is a C6-20 alkyl, aryl or aralkyl group, Y and Z each are a C1-20 alkyl group. The composition is improved in sensitivity stability and adhesion to substrates and eliminates the risk of causing corrosion of metal substrates.
申请公布号 US6218069(B1) 申请公布日期 2001.04.17
申请号 US20000480627 申请日期 2000.01.10
申请人 SHIN-ETSU CHEMICAL CO. LTD. 发明人 KATO HIDETO;FURIHATA TOMOYOSHI;OKAZAKI SATOSHI
分类号 H01L21/027;G03F7/004;G03F7/023;(IPC1-7):G03F7/023 主分类号 H01L21/027
代理机构 代理人
主权项
地址