| 摘要 |
PROBLEM TO BE SOLVED: To reduce the refuse generated by the rubbing which is caused between a glass substrate and a carrying belt by the warp of the glass substrate during a thermal CVD process. SOLUTION: In a belt carrying type film forming device in which the glass substrate is placed on the carrying belt with belt rings joined with each other through a core, and passed through a film forming furnace to form a film on the glass substrate, the carrying belt 5a comprises combined rows of belt rings 8b large in outside diameter and belt rings 8a small in outside diameter and the contact area of the carrying belt 5a with the glass substrate 1 is reduced by supporting the glass substrate 1 by the row of the belt rings 8b large in outside diameter.
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