| 摘要 |
PURPOSE: A Liquid precursor delivery apparatus is provided to efficiently supply the liquid precursor to a semiconductor processing device. CONSTITUTION: The liquid precursor supplying device(10) includes a supply source(11), an inflow tube(12), a two-directional valve(13), a pump assembly(14), an outflow tube(15), a cut-off valve(16), and a rapid flow evaporator(17). The pump assembly(14) has an either form of an injector or a variable quality pump and is controlled by an assembly between a pulse motor(27) and a linear encoder(30). This arrangement structure is set up so as to return unused liquid precursor to the supply source.
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