| 摘要 |
PROBLEM TO BE SOLVED: To eliminate variation in the joining strength and electromechanical coupling factor between vibrators and the characteristics of individual array vibrators at manufacturing of a laminated piezoelectric single-crystal element using piezoelectric single crystals composed of perovskite compounds. SOLUTION: A laminated piezoelectric single-crystal element, having a strong joining strength and a large electromechanical coupling factor between vibrators and the characteristics of individual array vibrators, is manufactured by sticking two or more pieces of single crystals 2a and 2b constituted in ABO3 type perovskite structure to each other by using metallic materials 3a and 3b of Ag, Sn, Au, Pd, etc., and, after bonding the pieces to each other by heating the pieces to 300-900 deg.C, polarizing the pieces. |
