| 摘要 |
PROBLEM TO BE SOLVED: To provide a ceramic heater for preventing the cracks of the insulating layer produced by the stress concentration caused by the shrinkage difference between the insulating layer and resistance heating body in each portion of the lead of the resistance heating body. SOLUTION: A ceramic heater includes a resistance heating material consisting of at least one of alumina based composition groups containing W, Re and Mo as the main ingredient and a ceramic material as the remaining. The resistance heating body consists of a heating part, and a pair of leading parts projected from both ends of the heating part, divided among a plurality of lead wires having a width of 0.8 mm or less except the leading parts and the both ends.
|
