| 摘要 |
The invention relates to a method and to a device for detecting the shape or the reflective properties of reflective or transparent specimens. According to the invention, a substantially sinusoidal pattern that is generated at a distance to the specimen is imaged by an auxiliary optical system once it is reflected by or has penetrated the specimen and the local phase of said pattern in the focal plane is determined. The aim of the invention is to provide a method that is highly sensitive and precise. To this end, the invention provides a method for choosing the distance of the pattern from the specimen, the observation aperture for the auxiliary optical system and the period of the pattern.
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