发明名称 |
PHOTODETECTORS USING III-V-NITRIDES |
摘要 |
A photodetector using a III-V nitride and having predetermined electrical properties is disclosed. The photodetector includes a substrate with interdigitated electrodes formed on its surface. The substrate has a sapphir e base layer, a buffer layer formed from a III-V nitride and a single crystal III-V nitride film. The three layers are formed by electron cyclotron resonance microwave plasma-assisted molecular beam epitaxy (ECR-assisted MBE ). Use of the ECR-assisted MBE process allows control and predetermination of t he electrical properties of the photodetector.
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申请公布号 |
CA2226439(C) |
申请公布日期 |
2001.04.10 |
申请号 |
CA19962226439 |
申请日期 |
1996.07.05 |
申请人 |
MISRA, MIRA;TRUSTEES OF BOSTON UNIVERSITY |
发明人 |
MISRA, MIRA;MOUSTAKAS, THEODORE D. |
分类号 |
H01L31/0304;H01L31/18;(IPC1-7):H01L31/00 |
主分类号 |
H01L31/0304 |
代理机构 |
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地址 |
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