SURFACE ACOUSTIC WAVE DEVICE AND ITS MANUFACTURING METHOD

摘要

PROBLEM TO BE SOLVED: To provide an SAW(surface acoustic wave) device having stable characteristic and a long life and its manufacturing method. SOLUTION: As for the comb-shaped electrodes 4 of the exciting electrodes 3 of an SAW device 1, each electrode finger 5 is obtained by forming the first metallic layer 6 having a film thickness of 1 nm to 30 nm based on tantalum on the piezoelectric substrate 2 and forming the second metallic layer 7 added with copper based on aluminum on the layer 6. The first metallic layer 6 and the second metallic layer 7 are continuously laminated and formed by a high frequency sputter method using a high frequency power source without vacuum break.