| 摘要 |
PROBLEM TO BE SOLVED: To provide an object detecting apparatus which eliminates the restrictions on the working environment by such as treating liquid atmospheres, etc., and is capable of reliably detecting the object, without contacting it hardly making wrong detection. SOLUTION: A roller conveyor 1 conveys a substrates W to below a sensor 16, the gas jetted from a first nozzle 61 collides with the substrates W there and hence is blocked to slightly raise the gas pressure in a first piping 71, while a gas jetted from a second nozzle 62 does not collide with the substrates W and thus the gas pressure in a second piping 72 little changes. In this time, a pressure difference sensor 85 outputs the pressure difference between both, and a controller 21 determines and recognizes that the substrates W exist at the position of the sensor 16, if the pressure difference exceeds a prescribed threshold. |
