BUBBLER DEVICE FOR WASHING SEMICONDUCTOR MATERIALS

摘要

PURPOSE: A bubbler device is provided to improve the durability of the bubbler device and to be readily managed. CONSTITUTION: A filter(61) has a mesh(62) made up of holes having the diameter of several tens to several hundreds micrometers. The filter is prepared with plural internal threads(63) positioned at the edge of the filter. A gas discharge plate(65) forms a groove(70) for discharging gas to the filter and plural internal threads corresponding to the internal threads of the filter. The groove formed on an upper face of the discharge plate is made up of a linear groove(66) and side grooves(67). The side grooves are equally distributed over the entire upper face of the gas discharge plate. The filter and the gas discharge plate are perfectly adhered to prevent gas leakage and fixed by inserting an external thread(64) in the internal thread. A gas supply pipe(68) is combined with an end of a central groove and a check valve(69) is installed on a path of the gas supply pipe. Then, the check valve prevents the reverse flow of the gas toward a gas supplier.