| 摘要 |
<p>A gas feed device capable of feeding high purity gas stably to consuming facilities by preventing the gas from being accumulated in a piping system, comprising a loop main pipe (2) connected to a gas feed source (6) and auxiliary pipes (3) having both ends connected to the main pipe (2) and having the consuming facilities (7) connected on the way thereof, wherein a valve (V3) for controlling the flow of gas in the auxiliary pipe (3) is provided on the way of the auxiliary pipe (3), exhaust pipes (4) are connected to near both sides of the valve (V3), respectively, and each of the exhaust pipes (4) has a valve (V4) and flowmeter (FI1), the exhaust pipes (4) can exhaust a part of the gas in the auxiliary pipe (3) to the outside while the gas is fed to the consuming facilities (7), and an opening and closing type valve (V2) is provided at both ends of the auxiliary pipe (3).</p> |
