发明名称 Piezoelectric/electrostrictive device and method of manufacturing same
摘要 A piezoelectric/electrostrictive device (10) comprises a pair of mutually opposing thin plate sections (16a, 16b), a movable section (20), and a fixation section (22) for supporting the thin plate sections (16a, 16b) and the movable section (20); one or more piezoelectric/ electrostrictive elements (24a, 24b) arranged on the pair of thin plate sections (16a, 16b); and a hole (12) formed by both inner walls of the pair of thin plate sections (16a, 16b), an inner wall (20a) of the movable section (20), and an inner wall (22a) of the fixation section (22), wherein the pair of thin plate sections (16a, 16b) are previously bent in directions to make mutual separation so that they have an outwardly convex configuration. <IMAGE>
申请公布号 EP1089349(A2) 申请公布日期 2001.04.04
申请号 EP20000308594 申请日期 2000.09.29
申请人 NGK INSULATORS, LTD. 发明人 TAKEUCHI, YUKIHISA;NANATAKI, TSUTOMU;KIMURA, KOJI
分类号 H01L41/09;H01L41/22;H01L41/27;H01L41/314;H01L41/39;H02N2/00 主分类号 H01L41/09
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