| 发明名称 |
Electric circuit having superconducting layered structure |
| 摘要 |
An electric circuit is provided on a semiconductor substrate with a supercoducting film. The surfaces being in contact with the superconducting film are made of heat-resistant non-oxide insulating materials so that the performance of the superconducting film is not degraded.
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| 申请公布号 |
US5274268(A) |
申请公布日期 |
1993.12.28 |
| 申请号 |
US19910798841 |
申请日期 |
1991.11.25 |
| 申请人 |
SEMICONDUCTOR ENERGY LABORATORY CO., LTD. |
发明人 |
YAMAZAKI, SHUMPEI |
| 分类号 |
H01L21/768;H01L23/498;H01L23/532;H01L29/43;H01L39/24;(IPC1-7):H01B12/00;H01L39/12;H01L23/48 |
主分类号 |
H01L21/768 |
| 代理机构 |
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