发明名称 |
Method for making an electron source with microtips, with self-aligned focusing grid |
摘要 |
A process for manufacturing a micropoint electron source with an extraction grid and a focusing grid. This process allows for precise alignment of the holes of the extraction grid with the apertures of the focusing grid by using a single photolithography step for making the holes in the extraction grid. Such a process may find particular application for making a micropoint electron source for a flat viewing screen.
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申请公布号 |
US6210246(B1) |
申请公布日期 |
2001.04.03 |
申请号 |
US20000463383 |
申请日期 |
2000.02.18 |
申请人 |
COMMISSARIAT A L'ENERGIE ATOMIQUE |
发明人 |
PERRIN AIMé;MONTMAYEUL BRIGITTE;BLANC RéGIS |
分类号 |
H01J3/02;H01J9/02;(IPC1-7):H01J9/02 |
主分类号 |
H01J3/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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