| 摘要 |
PROBLEM TO BE SOLVED: To provide a delivering method for a sheet member improving the sticking accuracy of the sheet member to work. SOLUTION: A method delivering a sheet member 5 having an adhesive layer on one side thereof to a stacking portion 708 includes; a holding step adsorbing and holding the sheet member 5 within walls of sheet adsorbing/ holding portions 72, 59 surrounding the upper surface and the outer peripheral surface of the sheet member 5; a surrounding step moving a sheet receiving surface of the stacking portion 708 to a position contacting with a bottom surface of the sheet member 5 so as to surround the all outer surface of the sheet 5; a moving step relatively moving the wall contacting with the upper surface of the sheet member 5 and the wall contacting with the outer periphery, of the sheet adsorbing/holding portions 72, 59, in a vertical direction; and a delivering step delivering the sheet member 5 from the sheet adsorbing/holding portions 72, 59 to the sheet receiving surface of the stacking portion 708 while keeping a specified thickness of the sheet member 5.
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