| 摘要 |
PROBLEM TO BE SOLVED: To provide a hole pattern detector which can detect a hole, even in the case where the target of observation is charged up and the background cannot be expressed with a light and shade value. SOLUTION: A hole pattern detector 20 is equipped with a spatial filtering processor 21 which spatially filters the SEM image inputted from an image input device 13, a differentiator 22 which differentiates the SEM image, a histogram processor 23 which processes the SEM image into a histogram, a threshold setter 24 which automatically sets the threshold to separate the histogram into two classes, a binary processor 25 which processes the SEM image into binary, a magnifier 26 which magnifies the binary image, a reducer 27 which scales down the binary image, and a hole detector 28 which detects a pattern equipped with known pattern features as a hole H from the binary image.
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