INSPECTION DEVICE FOR ELECTRODE AND METHOD THEREFOR

摘要

PROBLEM TO BE SOLVED: To reduce the number of probes by impressing a prescribed AC voltage pulse or DC voltage pulse between a contact probe and a noncontact probe to compare measured voltage signal with a voltage level. SOLUTION: Voltage is applied to a whole line from a power supply 31 to an electrode 12 via a noncontact probe 22. A control unit 23 detects the voltage from only one contact probe 21 at the electrode on a right end side, and the other contact probe 21 is earthed on the ground. Measured voltage signal is compared with a standard level of voltage and a voltage level in open circuit or short circuit, and the signal is outputted. The output signal is stored in a control part 35 with positional information of the contact probe 21 and the noncontact probe corresponding with each other. The contact probe 21 is then successively switched to measure each electrode 12. By moving the contact probe 21 and the noncontact probe 22 is an X-direction, the whole line is measured by repeating this.