| 摘要 |
PROBLEM TO BE SOLVED: To downsize a contact probe and extend a lifetime of a contact probe by a method wherein there is provided a socket comprising a conductive gas pressure chamber part for sliding a plunger in a cylindrical chamber. SOLUTION: There are provided, in a device, a conductive cylindrical chamber part 3 having a hole into which a rear end part 1a of a plunger 1 is inserted, to axially slide the plunger 1, and a wall 5 having a ventilation hole 4 integrated with the cylindrical chamber part 3, to prevent the rear end part 1a of the plunger 1 from entering. There is provided a socket 2 comprising a conductive gas pressure chamber part 7 in which a compressed gas is supplied from a compressed gas introduction hole 6 on a side wall through the ventilation hole 4 of the wall 5, so as to slide the plunger 1 in the hole of the cylindrical chamber part 3. Furthermore, a recess 8 for storing a solder 9 is formed at an upper end part of the socket 2, and it is possible to readily solder a lead wire 10 from a tester body. As a seal material and a gap are not present between the rear end part 1a of the plunger 1 and an inner wall 3a, it is possible to set an inner diameter of the socket 2 to 1 mm or less. |
